@article{125536,
  author = {Thomas Germer},
  title = {Angular Dependence and Polarization of Out-of-plane Optical Scattering from Particulate Contamination, Subsurface Defects, and Surface Microroughness},
  year = {1997},
  number = {36},
  month = {1997-01-01},
  publisher = {Applied Optics},
  language = {en},
}