@conference{125496,
  author = {Lori Goldner},
  title = {Highly Charged Ion Bombardment of Silicon Surfaces Applications of Accelerators in Research and Industry, ed. by J.L. Duggan},
  year = {2003},
  month = {2003-01-01},
  publisher = {17TH International Conference on the Application of Accelerators in Research and Industry, Denton, TX},
  language = {en},
}