@misc{1252696,
  author = {Ran Tao and Benson Chan and Jan Vardaman},
  title = {2024 ECTC Special Session Report: Advancing Metrology for Next-Generation Microelectronics},
  year = {2024},
  month = {2024-07-31 04:07:00},
  publisher = {IEEE Electronics Packaging Society},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=958598},
  language = {en},
}