@article{12461, author = {Chukwudi Okoro and James Marro and Yaw Obeng and Kathleen Richardson}, title = {Defect and Microstructural Evolution in Thermally Cycled Cu Through-Silicon Vias}, year = {2014}, month = {2014-06-14}, publisher = {Microelectronics Reliability}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915535}, language = {en}, }