@conference{12456, author = {Chukwudi Okoro and Lyle Levine and Yaw Obeng and Klaus Hummler and Ruqing Xu}, title = {X-Ray Micro-Beam Diffraction Measurement of the Effect of Thermal Cycling on Stress in Cu TSV: A Comparative Study}, year = {2014}, month = {2014-05-26}, publisher = {Proceeding of IEEE Electronic Components and Technology Conference (ECTC), Lake Buena Vista, FL}, language = {en}, }