@article{12391, author = {Ravikiran Attota and Ronald Dixson}, title = {Resolving three-dimensional shape of sub-50 nm wide lines with nanometer-scale sensitivity using conventional optical microscopes}, year = {2014}, number = {105}, month = {2014-07-29}, publisher = {Applied Physics Letters}, doi = {https://doi.org/10.1063/1.4891676}, language = {en}, }