@article{1236481,
  author = {Joseph Fowler and Zachary H. Levine and Paul Szypryt and Daniel Swetz},
  title = {Superconducting X-ray Sensors for Tomography of Microelectronics},
  year = {2023},
  number = {25},
  month = {2023-11-01 04:11:00},
  publisher = {Electronic Device Failure Analysis},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=936684},
  doi = {https://doi.org/10.31399/asm.edfa.2023-4.p004},
  language = {en},
}