@conference{1228871,
  author = {Marla L. Dowell and Hannah Brown and Gretchen Greene and Paul D. Hale and Brian Hoskins and Sarah Hughes and Bob R. Keller and R Joseph Kline and June W. Lau and Jeff Shainline},
  title = {Advancing Measurement Science for Microelectronics: CHIPS R&D Metrology Program},
  year = {2024},
  month = {2024-02-13 14:02:18},
  publisher = {E.M. Secula and J. A. Liddle, Frontiers of Characterization and Metrology for Nanoelectronics: 2024, Monterey, CA, US},
  language = {en},
}