@article{1228556,
  author = {Shin Muramoto and Daniel Graham and David Castner},
  title = {ToF-SIMS Analysis of Ultrathin Films and Their Fragmentation Patterns},
  year = {2024},
  month = {2024-02-08 05:02:00},
  publisher = {Journal of Vacuum Science & Technology A},
  language = {en},
}