@misc{1222061,
  author = {Jason Kahn and Chris Greer},
  title = {Semiconductors and Microelectronics Standards, Report of the Semiconductors and Microelectronics Working Group},
  year = {2023},
  month = {2023-12-05 05:12:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956962},
  doi = {https://doi.org/10.6028/NIST.IR.8501},
  language = {en},
}