@article{12206,
  author = {Robert Berg},
  title = {Capillary flow meter for calibrating spinning rotor gauges},
  year = {2008},
  number = {26},
  month = {2008-08-06},
  publisher = {Journal of Vacuum Science and Technology A},
  doi = {https://doi.org/10.1116/1.2953715},
  language = {en},
}