@article{12161,
  author = {Charles Tarrio and Steven Grantham and Thomas Germer and Jack Rife and Thomas Lucatorto and Mike Kriese and Yuriy Platonov and Licai Jiang and Jim Rodriguez},
  title = {Improved measurement capabilities at the NIST EUV Reflectometry Facility},
  year = {2014},
  number = {9048},
  month = {2014-08-01},
  publisher = {SPIE Conference Proceedings},
  language = {en},
}