@article{12156,
  author = {Steven Grantham and Mike Kriese and Yuriy Platonov and Bodo Ehlers and Licai Jiang and Jim Rodriguez and Mueller Ulrich and Shayna khatri and Adam Magruder and Charles Tarrio},
  title = {Development of an EUVL collector with infrared radiation suppression},
  year = {2014},
  number = {9048},
  month = {2014-08-01},
  publisher = {SPIE Conference Proceedings},
  language = {en},
}