@misc{1214106,
  author = {Aaron Johnston-Peck and Andrew Herzing},
  title = {Four-dimensional scanning transmission electron microscopy: I, Imaging, strain mapping and defect detection},
  year = {2023},
  month = {2023-08-01 04:08:00},
  publisher = {Electronic Device Failure Analysis Magazine},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=936621},
  language = {en},
}