@misc{1212416,
  author = {Elizabeth Rasmussen and Boris Wilthan and Brian Simonds},
  title = {Report from the Extreme Ultraviolet (EUV) Lithography Working Group Meeting: Current State, Needs, and Path Forward},
  year = {2023},
  month = {2023-08-22 04:08:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=956144},
  doi = {https://doi.org/10.6028/NIST.SP.1500-208},
  language = {en},
}