@article{1209986, author = {Kin (Charles) Cheung}, title = {A non-defect precursor gate oxide breakdown model}, year = {2023}, number = {133}, month = {2023-06-16 04:06:00}, publisher = {Journal of Applied Physics}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935952}, doi = {https://doi.org/10.1063/5.0146394}, language = {en}, }