@article{1207276,
  author = {Adam McCaughan and Alexander Tait and Sonia Buckley and Jeff Chiles and Jeff Shainline and Sae Woo Nam and Dylan Oh},
  title = {PHIDL: Python-based layout and geometry creation for nanolithography},
  year = {2021},
  month = {2021-09-27 04:09:00},
  publisher = {Journal of Vacuum Science and Technology B},
  doi = { https://doi.org/10.1116/6.0001203},
  language = {en},
}