@article{1206906,
  author = {Diego Perez Morelo and Mingkang Wang and Venkatesh Madhaven and Mogana Sathisivan and Charlie Tay and Vladimir Aksyuk},
  title = {Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography},
  year = {2023},
  number = {32},
  month = {2023-06-03 04:06:00},
  publisher = {IEEE Journal of Microelectromechanical Systems},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935730},
  doi = {https://doi.org/10.1109/JMEMS.2023.3247300},
  language = {en},
}