@conference{12056,
  author = {Charles Tarrio and Steven Grantham and Marc Cangemi and Robert Vest and Thomas Lucatorto and Noreen Harned},
  title = {EUVL dosimetry at NIST},
  year = {2009},
  month = {2009-03-13},
  publisher = {Proceedings of SPIE, Vol. 7271, Alternative Lithographic Technologies, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901663},
  language = {en},
}