@article{12051,
  author = {Charles Tarrio and Bruce Benner and Robert Vest and Steven Grantham and Shannon Hill and Thomas Lucatorto and Jay Hendricks and Patrick Abbott and Greg Denbeaux and Alin Antohe and Chimaobi Mbanaso and Kevin Orbek},
  title = {Quantitative Measurement of Outgas Products From EUV Photoresists},
  year = {2008},
  number = {6921},
  month = {2008-03-14},
  publisher = {SPIE},
  language = {en},
}