@misc{1203951,
  author = {Alice V Ling and András Vládar and Bradley N Damazo and M Alkan Donmez and Michael T Postek},
  title = {SEM Sentinel::SEM performance measurement system, part 1},
  year = {2000},
  month = {2000-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.6498},
  language = {en},
}