@misc{1203861,
  author = {Joaquin V Martinez de Pinillos and Stephen Knight and Alice Settle-Raskin},
  title = {Silicon microelectronics programs at the National Institute of Standards and Technology::programs, activities, and accomplishments},
  year = {2000},
  month = {2000-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.6522},
  language = {en},
}