@article{12036,
  author = {Charles Tarrio and Steven Grantham and Robert Vest and Thomas Lucatorto},
  title = {At-Wavelength Metrology for EUV Lithography at NIST},
  year = {2009},
  month = {2009-07-14},
  publisher = {International Extreme Ultraviolet Lithography Symposium},
  language = {en},
}