@misc{1201971,
  author = {Clare Allocca and Stephen Freiman},
  title = {NanometrologyPrograms and accomplishments ::FY 2003 program and selected accomplishments},
  year = {2004},
  month = {2004-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.7074},
  language = {en},
}