@misc{1201746,
  author = {Ya-Shian Li and Brad Van Eck},
  title = {Semiconductor factory and equipment clock synchronization for e-manufacturing:},
  year = {2004},
  month = {2004-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.7184},
  language = {en},
}