@misc{1199091, author = {T V Vorburger and J Raja}, title = {Surface finish metrology tutorial:}, year = {1990}, month = {1990-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NIST.IR.89-4088}, language = {en}, }