@misc{1198761,
  author = {J J Kopanski and D B Novotny},
  title = {Development and characterization of insulating layers on silicon carbide::annual report for February 14, 1988 to February 14, 1989},
  year = {1989},
  month = {1989-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.89-4157},
  language = {en},
}