@misc{1196946, author = {James E Potzick}, title = {Standard Reference Materials ::Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems/}, year = {1997}, month = {1997-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NIST.SP.260-129}, language = {en}, }