@misc{1196746, author = {Warren K Gladden and Stephen R Slaughter and Walter M Duncan and Aslan Baghdadi}, title = {Automatic determination of the interstitial oxygen content of silicon wafers polished on both sides:}, year = {1988}, month = {1988-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NIST.SP.400-81}, language = {en}, }