@misc{1196656,
  author = {Barbara J Belzer and David L Blackburn},
  title = {Semiconductor measurement technology ::the results of an interlaboratory study of ellipsometric measurements of thin film silicon dioxide on silicon},
  year = {1997},
  month = {1997-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.400-99},
  language = {en},
}