@misc{1194201, author = {K F Galloway and R J Scace and E J Walters}, title = {Semiconductor technology program ::progress briefs}, year = {1981}, month = {1981-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.IR.81-2230-3}, language = {en}, }