@misc{1184051, author = {Santos Mayo and William H Evans}, title = {Development of hydrogen and hydroxyl contamination in thin silicon dioxide thermal films:}, year = {1979}, month = {1979-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.IR.78-1558}, language = {en}, }