@misc{1181286,
  author = {Robert I Scace},
  title = {Semiconductor technology for the non-technologist:},
  year = {1981},
  month = {1981-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.81-2197},
  language = {en},
}