@misc{1179241,
  author = {E J Walters},
  title = {Semiconductor technology program ::progress briefs},
  year = {1983},
  month = {1983-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.82-2636},
  language = {en},
}