@misc{1175936,
  author = {D Nyyssonen},
  title = {Linewidth calibration for bright-chromium photomasks:},
  year = {1986},
  month = {1986-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.86-3357},
  language = {en},
}