@misc{1175306,
  author = {R D Larrabee and M I Bell},
  title = {Nondestructive evaluation activities in the Semiconductor Materials and Processes Division:},
  year = {1986},
  month = {1986-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.86-3495},
  language = {en},
}