@misc{1174821,
  author = {Didier Kane and Benjamin A Moore and W Janes Walters},
  title = {RADCNBS international workshop moisture measurement and control for microelectronics (IV) ::proceedings of the RADCNBS workshop held at the National Bureau of Standards Gaithersburg, MD November 12-14, 1986},
  year = {1987},
  month = {1987-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.IR.87-3588},
  language = {en},
}