@article{117381,
  author = {D Tanenbaum and A Laracuente and A Gallagher},
  title = {Surface roughening during plasma enhanced chemical-vapor deposition of hydrogenated amorphous silicon on crystal silicon substrates},
  year = {1997},
  number = {56},
  month = {1997-01-01},
  publisher = {Physical Review B (Condensed Matter and Materials Physics)},
  language = {en},
}