@misc{1161996, author = {Richard L Mattis and Martin G Buehler}, title = {A BASIC program for calculating dopant density profiles from capaciyance-voltage:}, year = {1975}, month = {1975-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.SP.400-11}, language = {en}, }