@misc{1161926,
  author = {David E Sawyer and David W Berning},
  title = {A laser scanner for semiconductor devices:},
  year = {1977},
  month = {1977-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-24},
  language = {en},
}