@misc{1161886, author = {Werner Kern and Robert B Comizzoli}, title = {Techniques for measuring the integrity of passivation overcoats on integrated circuits:}, year = {1977}, month = {1977-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.SP.400-31}, language = {en}, }