@misc{1161881, author = {W Robert Thurber and Martin G Buehler}, title = {Microelectronic test pattern NBS-4:}, year = {1978}, month = {1978-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.SP.400-32}, language = {en}, }