@misc{1161796, author = {David H Dickey and James R Ehrstein}, title = {Spreading resistance analysis for silicon layers with nonuniform resistivity:}, year = {1979}, month = {1979-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.SP.400-48}, language = {en}, }