@misc{1161791, author = {Robert G Wilson and Howard L Dunlap and Douglas M Jamba and David R Myers}, title = {Angular sensitivity of controlled implanteddoping profiles:}, year = {1978}, month = {1978-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.SP.400-49}, language = {en}, }