@misc{1161776,
  author = {T J Russell and D A Maxwell},
  title = {A production-compatible microelectronic test pattern for evaluating photomask misalignment:},
  year = {1979},
  month = {1979-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-51},
  language = {en},
}