@misc{1161776, author = {T J Russell and D A Maxwell}, title = {A production-compatible microelectronic test pattern for evaluating photomask misalignment:}, year = {1979}, month = {1979-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.SP.400-51}, language = {en}, }