@misc{1161756,
  author = {R Y Koyama and M G Buehler},
  title = {A wafer chuck for use between -196 and 350 degrees C:},
  year = {1979},
  month = {1979-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-55},
  language = {en},
}