@misc{1161731, author = {Martin G Buehler}, title = {Microelectronic test patterns:}, year = {1974}, month = {1974-01-01 05:01:00}, publisher = {, National Institute of Standards and Technology, Gaithersburg, MD}, doi = {https://doi.org/10.6028/NBS.SP.400-6}, language = {en}, }