@misc{1161706,
  author = {W R Thurber and R L Mattis and Liu Y and and J J Filliben},
  title = {The relationship between resistivity and dopant density for phosphorus-and boron-doped silicon:},
  year = {1981},
  month = {1981-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-64},
  language = {en},
}