@misc{1161686,
  author = {G P Carver and W A Cullins},
  title = {A manual wafer probe station for an integrated circuit test system:},
  year = {1981},
  month = {1981-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-68},
  language = {en},
}