@misc{1161616,
  author = {A Baghdadi and E J Walters},
  title = {Silicon-on-insulator:},
  year = {1987},
  month = {1987-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NBS.SP.400-80},
  language = {en},
}